Semiconductor materials and process tecnology handbook;  for very large scale integration(VLSI) and ultra large scale integration 
by McGuire, Gary E. 
 - Mumbai  Jaico publishing house  2007 
 - 675p. 
<br/><br/><label>ISBN: </label>81-7992-537-4 
<br/><br/><label>Subjects--Topical Terms: </label>--School of Engineering and Technology
<br/><br/><label>LC Class. No.: </label>QC 715.4  / .G37 2007